Object Plane Ladder Wafer Efficiency Inefficiency Hits Missing hits plane Y0 99.5 % 0.5 % 20237 105 plane X0 99.5 % 0.5 % 20387 105 plane X1 99.9 % 0.1 % 21975 31 plane Y1 99.9 % 0.1 % 22086 17 plane Y2 99.5 % 0.5 % 23706 109 plane X2 99.8 % 0.2 % 23593 40 plane X3 99.6 % 0.4 % 22572 101 plane Y3 99.7 % 0.3 % 22566 76 plane Y4 99.6 % 0.4 % 21908 81 plane X4 99.5 % 0.5 % 21854 106 plane X5 99.7 % 0.3 % 21249 60 plane Y5 99.5 % 0.5 % 21245 101 plane Y6 99.5 % 0.5 % 20856 94 plane X6 99.8 % 0.2 % 20866 51 plane X7 99.8 % 0.2 % 20741 38 plane Y7 99.9 % 0.1 % 20711 30 plane Y8 99.9 % 0.1 % 21085 24 plane X8 99.8 % 0.2 % 21083 50 plane X9 99.8 % 0.2 % 21310 36 plane Y9 99.8 % 0.2 % 21318 36 plane Y10 99.8 % 0.2 % 21674 33 plane X10 99.9 % 0.1 % 21711 23 plane X11 99.9 % 0.1 % 22251 28 plane Y11 99.8 % 0.2 % 22252 44 plane Y12 99.6 % 0.4 % 22962 87 plane X12 99.8 % 0.2 % 23019 37 plane X13 99.7 % 0.3 % 23696 75 plane Y13 99.8 % 0.2 % 23807 41 plane Y14 99.6 % 0.4 % 24423 93 plane X14 99.9 % 0.1 % 24529 32 plane X15 99.7 % 0.3 % 25420 75 plane Y15 100.0 % 0.0 % 25394 12 plane Y16 99.9 % 0.1 % 23594 18 plane X16 99.6 % 0.4 % 23461 88 plane X17 99.5 % 0.5 % 21644 118 plane Y17 99.4 % 0.6 % 21536 119 tower 99.7 % 0.3 % 802721 2214